WebNov 12, 2024 · The planar magnetron sputtering discharge was introduced in the early 1970s (Chapin 1974, 1979) and this configuration is now well established for sputter … WebJan 2, 2024 · Abstract. ZrN x films were deposited by DC magnetron sputtering with pure Zr target in different nitrogen partial pressure atmospheres (). The structure and …
Composition-dependent structural and electrical properties of …
WebFeb 23, 2024 · This system was equipped with two DC power sources and one RF power source for sputtering. Before sputtering of target materials (Ni, Cu, and Ti with 99 ... M. Kumagai, H. Saito, and Y. Muramatsu, “Hard nanocomposite Ti-Cu-N films prepared by d.c. reactive magnetron co-sputtering,” Surface and Coatings Technology, vol. 183, no. 1, … WebReactive RF-magnetron sputtering (RFMS) is very similar to its DC counterpart and so the traditional parameters, such as 0 2 /Ar flow ratio, substrate heating, and substrate … fidelity mini sensory chess challenger
Reactive Gas Sputtering - Angstrom Engineering
WebJan 4, 2011 · CuAlO x thin films were prepared at three substrate temperatures (T S = 60, 300, and 600 ° C) and two oxygen partial pressures (P O 2 = 0.5 and 2 mTorr) via dc … WebMagnetron sputtering This article has been downloaded from IOPscience. Please scroll down to see the full text article. ... cathodic sputtering. diode sputtering, KF or DC sputtering. ion-beam sputtering, reactive sput- ... and concentrated into a region in front of the target. is is '\ \ / a & DC DC KF. is (CO, - / A ... WebBactericidal efficiency of nanostructured Al–O/Ti–O composite thin films prepared by dual magnetron reactive co-sputtering technique . × Close Log In. Log in with Facebook … grey gel nail ideas